MECENG119
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MECENG 119 - Introduction to MEMS (Microelectromechanical Systems)
Course Title
Introduction to MEMS (Microelectromechanical Systems)
Course Description
Fundamentals of microelectromechanical systems including design, fabrication of microstructures; surface-micromachining, bulk-micromachining, LIGA, and other micro machining processes; fabrication principles of integrated circuit device and their applications for making MEMS devices; high-aspect-ratio microstructures; scaling issues in the micro scale (heat transfer, fluid mechanics and solid mechanics); device design, analysis, and mask layout.
Minimum Units
3
Maximum Units
3
Grading Basis
Default Letter Grade; P/NP Option
Method of Assessment
Written Exam
Instructors
Staff
Prerequisites
EE 16A or EE 40, and Physics 7B.
Repeat Rules
Course is not repeatable for credit.
Formats
Lecture
Term
Fall and Spring
Weeks
15 weeks
Weeks
15
Lecture Hours
3
Lecture Hours Min
3
Lecture Hours Max
3
Outside Work Hours
6
Outside Work Hours Min
6
Outside Work Hours Max
6