ELENG143
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ELENG 143 - Microfabrication Technology
Subject
ELENG
Course Number
143
Department
Course Level
Undergraduate
Course Title
Microfabrication Technology
Course Description
Integrated circuit device fabrication and surface micromachining technology. Thermal oxidation, ion implantation, impurity diffusion, film deposition, expitaxy, lithography, etching, contacts and interconnections, and process integration issues. Device design and mask layout, relation between physical structure and electrical/mechanical performance. MOS transistors and poly-Si surface microstructures will be fabricated in the laboratory and evaluated.
Minimum Units
4
Maximum Units
4
Grading Basis
Default Letter Grade; P/NP Option
Method of Assessment
Written Exam
Instructors
Staff
Prerequisites
PHYSICS 7B
Repeat Rules
Course is not repeatable for credit.
Credit Restriction Courses. Students will receive no credit for this course if following the course(s) have already been completed.
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Formats
Lecture, Laboratory
Term
Fall and Spring
Weeks
15 weeks
Weeks
15
Lecture Hours
3
Lecture Hours Min
3
Lecture Hours Max
3
Laboratory Hours
3
Laboratory Hours Min
3
Laboratory Hours Max
3
Outside Work Hours
6
Outside Work Hours Min
6
Outside Work Hours Max
6