ELENG147

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ELENG 147 - Introduction to Microelectromechanical Systems (MEMS)

Electrical Engineering and Computer Sciences Undergraduate COE - College of Engineering

Subject

ELENG

Course Number

147

Department

Electrical Engineering and Computer Sciences

Course Level

Undergraduate

Course Title

Introduction to Microelectromechanical Systems (MEMS)

Course Description

This course will teach fundamentals of micromachining and microfabrication techniques, including planar thin-film process technologies, photolithographic techniques, deposition and etching techniques, and the other technologies that are central to MEMS fabrication. It will pay special attention to teaching of fundamentals necessary for the design and analysis of devices and systems in mechanical, electrical, fluidic, and thermal energy/signal domains, and will teach basic techniques for multi-domain analysis. Fundamentals of sensing and transduction mechanisms including capacitive and piezoresistive techniques, and design and analysis of micmicromachined miniature sensors and actuators using these techniques will be covered.

Minimum Units

3

Maximum Units

3

Grading Basis

Default Letter Grade; P/NP Option

Method of Assessment

Written Exam

Instructors

Maharbiz, Nguyen, Pister

Prerequisites

EECS 16A and EECS 16B.

Repeat Rules

Course is not repeatable for credit.

Credit Restriction Courses. Students will receive no credit for this course if following the course(s) have already been completed.

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Formats

Lecture, Discussion

Term

Fall and Spring

Weeks

15 weeks

Weeks

15

Lecture Hours

3

Lecture Hours Min

3

Lecture Hours Max

3

Discussion Hours

1

Discussion Hours Min

1

Discussion Hours Max

1

Outside Work Hours

5

Outside Work Hours Min

5

Outside Work Hours Max

5